Electronic engineer master (microprocessors)?

VLSI is for who make chips later. Digital signal processing can be an elective, which will come close to your desire. SOmetimes though what specialisation you take is immaterial as you will have to specialise in what you do. M Tech may be a proof to say that you have the grit to specialise. Once that is proven, you can on your own specialise in amny associated fileds. To be doing microprocessor work, a BE may be adequate. You may see data sheets of some micro's from ATMEL and Renesas to judge for yourself.